Chemistry of Atomic Layer Deposition
This book will help chemists and non-chemists alike understand the fundamentals of surface chemistry and precursor design, and how these precursors drive the processes of atomic layer deposition, and how the surface-precursor interaction governs atomic layer deposition processes. The underlying principles in atomic layer deposition rely on the chemistry of a precursor with a surface.
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This book will help chemists and non-chemists alike understand the fundamentals of surface chemistry and precursor design, and how these precursors drive the processes of atomic layer deposition, and how the surface-precursor interaction governs atomic layer deposition processes. The underlying principles in atomic layer deposition rely on the chemistry of a precursor with a surface.
Detaljer
- Forlag
- De Gruyter
- Språk
- Engelsk
- Sider
- 113
- ISBN
- 9783110712537
- Utgivelsesår
- 2021
- Format
- Kopibeskyttet PDF (Må leses i Adobe Digital Editions)
Om forfatteren
Seán Thomas Barry, Carleton University, Ottawa, Canada.